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Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes
Chalcogenide glasses (ChGs) are emerging as critical infrared (IR)-enabled materials in advanced IR optical systems by the wealth of their transparency in the key wide infrared (IR) transmission window. However, fabrication of ChG-based integrated micro-optical components in an efficient and economi...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7475922/ https://www.ncbi.nlm.nih.gov/pubmed/32784658 http://dx.doi.org/10.3390/ma13163490 |
Sumario: | Chalcogenide glasses (ChGs) are emerging as critical infrared (IR)-enabled materials in advanced IR optical systems by the wealth of their transparency in the key wide infrared (IR) transmission window. However, fabrication of ChG-based integrated micro-optical components in an efficient and economical way remains a huge challenge. In this paper, a 3D close-packed hexagonal microlens array (MLA) possessing over 6000 convex hexagonal micro-lenslets with the size of tens of micrometers within a footprint of 10 mm × 10 mm on a Ge(20)Sb(15)Se(65) ChG surface was successfully fabricated via a precise thermal-mechanical molding process. The master mold of ChG MLA was firstly fabricated by a femtosecond laser-assisted chemical etching process and then transferred on to the surface of the ChG via a precision thermo-mechanical molding process, which resulted in a convex MLA. The morphology, imaging and focusing performances of the as-prepared ChG MLA were investigated and demonstrated the advancement of the method. Meanwhile, the IR transmittance and x-ray diffraction image of the ChG MLAs were measured to verify the structural and compositional stability of the ChG under the given molding conditions. The combined results proved a new route to mass production of miniaturized gapless ChG MLAs for advanced infrared micro-optics. |
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