Microstructure and Mechanical Properties of Annealed WC/C PECVD Coatings Deposited Using Hexacarbonyl of W with Different Gases

The present work studies the tungsten carbide (WC/C) coatings deposited by using Plasma Enhanced Chemical Vapor Deposition (PECVD), with and without gases of Ar and N(2). Volatile hexacarbonyl of W was used as a precursor. Their mechanical and tribological properties were evaluated. The following va...

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Detalles Bibliográficos
Autores principales: Horňák, Peter, Kottfer, Daniel, Kyzioł, Karol, Trebuňová, Marianna, Majerníková, Janka, Kaczmarek, Łukasz, Trebuňa, Jozef, Hašuľ, Ján, Paľo, Miroslav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476016/
https://www.ncbi.nlm.nih.gov/pubmed/32823605
http://dx.doi.org/10.3390/ma13163576

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476016/
https://www.ncbi.nlm.nih.gov/pubmed/32823605
http://dx.doi.org/10.3390/ma13163576

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