Double-gate thin film transistor with suspended-gate applicable to tactile force sensor

This paper presents a straightforward, low-cost, and effective integration process for the fabrication of membrane gate thin film transistors (TFTs) with an air gap. The membrane gate TFT with an air gap can be used as the highly sensitive tactile force sensor. The suspended membrane gate with an ai...

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Detalles Bibliográficos
Autores principales: Nguyen, An Hoang-Thuy, Nguyen, Manh-Cuong, Cho, Seongyong, Nguyen, Anh-Duy, Kim, Hyewon, Seok, Yeongcheol, Yoon, Jiyeon, Choi, Rino
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Singapore 2020
Materias:
Full Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7492326/
https://www.ncbi.nlm.nih.gov/pubmed/32930906
http://dx.doi.org/10.1186/s40580-020-00240-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7492326/
https://www.ncbi.nlm.nih.gov/pubmed/32930906
http://dx.doi.org/10.1186/s40580-020-00240-9

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