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Macroscopic Alignment of Block Copolymers on Silicon Substrates by Laser Annealing
[Image: see text] Laser annealing is a competitive alternative to conventional oven annealing of block copolymer (BCP) thin films enabling rapid acceleration and precise spatial control of the self-assembly process. Localized heating by a moving laser beam (zone annealing), taking advantage of steep...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American
Chemical Society
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7497666/ https://www.ncbi.nlm.nih.gov/pubmed/32159943 http://dx.doi.org/10.1021/acsnano.0c00696 |