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Design Calculation of Cleanroom
Both the uniform and nonuniform distribution theories of cleanroom have been introduced. In order to meet the need of practical application, the method and procedure of specific analysis calculation will be given in this chapter.
Autor principal: | Xu, Zhonglin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7498879/ http://dx.doi.org/10.1007/978-3-642-39374-7_13 |
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