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Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device †
Waveguides with sub-100 nm thickness offer a promising platform for sensors. We designed and analyzed multimode interference (MMI) devices using these ultrathin platforms for use as biosensors. To verify our design methodology, we compared the measured and simulated spectra of fabricated 220-nm-thic...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506679/ https://www.ncbi.nlm.nih.gov/pubmed/32883015 http://dx.doi.org/10.3390/s20174955 |