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Magnetic Micro Sensors with Two Magnetic Field Effect Transistors Fabricated Using the Commercial Complementary Metal Oxide Semiconductor Process

The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect transistors (MAGFETs) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The magnetic micro sensor is a three-axis sensing type. The structure of the mag...

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Detalles Bibliográficos
Autores principales:	Chen, Wei-Ren, Tsai, Yao-Chuan, Shih, Po-Jen, Hsu, Cheng-Chih, Dai, Ching-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506958/ https://www.ncbi.nlm.nih.gov/pubmed/32825769 http://dx.doi.org/10.3390/s20174731

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