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Tailoring Artificial Mode to Enable Cofired Integration of Shear‐type Piezoelectric Devices

Low‐temperature cofired ceramic technology is the prerequisite for producing advanced integrated piezoelectric devices that enable modern micro‐electromechanical systems because of merits such as high level of compactness and ultralow drive voltage. However, piezoceramic structure with shear‐type ou...

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Detalles Bibliográficos
Autores principales:	Yang, Jikun, Huan, Qiang, Yu, Yang, Wu, Jingen, Chu, Zhaoqiang, PourhosseiniAsl, MohammadJavad, Li, Faxin, Dong, Shuxiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	John Wiley and Sons Inc. 2020
Materias:	Full Papers
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7507555/ https://www.ncbi.nlm.nih.gov/pubmed/32999819 http://dx.doi.org/10.1002/advs.202001368

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