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Mechanical Properties and Corrosion Resistance of NbTiAlSiZrN(x) High-Entropy Films Prepared by RF Magnetron Sputtering
In this study, we designed and fabricated NbTiAlSiZrN(x) high-entropy alloy (HEA) films. The parameters of the radio frequency (RF) pulse magnetron sputtering process were fixed to maintain the N(2) flux ratio at 0%, 10%, 20%, 30%, 40%, and 50%. Subsequently, NbTiAlSiZrN(x) HEA films were deposited...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7514885/ https://www.ncbi.nlm.nih.gov/pubmed/33267110 http://dx.doi.org/10.3390/e21040396 |