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Controlling the flux of reactive species: a case study on thin film deposition in an aniline/argon plasma
The plasma based synthesis of thin films is frequently used to deposit ultra-thin and pinhole-free films on a wide class of different substrates. However, the synthesis of thin films by means of low temperature plasmas is rather complex due to the great number of different species (neutrals, radical...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7522240/ https://www.ncbi.nlm.nih.gov/pubmed/32985556 http://dx.doi.org/10.1038/s41598-020-72634-y |