Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization

[Image: see text] Aluminum oxide, both in amorphous and crystalline forms, is a widely used inorganic ceramic material because of its chemical and structural properties. In this work, we synthesized amorphous aluminum oxide nanoparticles using a capacitively coupled nonthermal plasma utilizing trime...

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Detalles Bibliográficos
Autores principales: Li, Zhaohan, Wray, Parker R., Su, Magel P., Tu, Qiaomiao, Andaraarachchi, Himashi P., Jeong, Yong Jin, Atwater, Harry A., Kortshagen, Uwe R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7528284/
https://www.ncbi.nlm.nih.gov/pubmed/33015493
http://dx.doi.org/10.1021/acsomega.0c03353

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