Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching

Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiO(x) shell on crystalline pillar cores introduced by local electrochemic...

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Detalles Bibliográficos
Autores principales: Qian, Yang, Magginetti, David J., Jeon, Seokmin, Yoon, Yohan, Olsen, Tony L., Wang, Maoji, Gerton, Jordan M., Yoon, Heayoung P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7530667/
https://www.ncbi.nlm.nih.gov/pubmed/33004988
http://dx.doi.org/10.1038/s41598-020-73445-x

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7530667/
https://www.ncbi.nlm.nih.gov/pubmed/33004988
http://dx.doi.org/10.1038/s41598-020-73445-x

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