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Targeted enrichment of (28)Si thin films for quantum computing
We report on the growth of isotopically enriched (28)Si epitaxial films with precisely controlled enrichment levels, ranging from natural abundance ratio of 92.2% all the way to 99.99987% (0.83 × 10(−6) mol mol(−1 29)Si). Isotopically enriched (28)Si is regarded as an ideal host material for semicon...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7543190/ https://www.ncbi.nlm.nih.gov/pubmed/33043155 |