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A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature

In this work, Pt-doped In(2)O(3) nanoparticles (Pt-In(2)O(3)) were inkjet printed on a FET-type sensor platform that has a floating gate horizontally aligned with a control gate for humidity detection at room temperature. The relative humidity (RH)-sensing behavior of the FET-type sensor was investi...

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Autores principales: Wu, Meile, Wu, Zhanyu, Jin, Xiaoshi, Lee, Jong-Ho
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7560637/
https://www.ncbi.nlm.nih.gov/pubmed/33052477
http://dx.doi.org/10.1186/s11671-020-03426-6
_version_ 1783595127086776320
author Wu, Meile
Wu, Zhanyu
Jin, Xiaoshi
Lee, Jong-Ho
author_facet Wu, Meile
Wu, Zhanyu
Jin, Xiaoshi
Lee, Jong-Ho
author_sort Wu, Meile
collection PubMed
description In this work, Pt-doped In(2)O(3) nanoparticles (Pt-In(2)O(3)) were inkjet printed on a FET-type sensor platform that has a floating gate horizontally aligned with a control gate for humidity detection at room temperature. The relative humidity (RH)-sensing behavior of the FET-type sensor was investigated in a range from 3.3 (dry air in the work) to about 18%. A pulsed measurement method was applied to the transient RH-sensing tests of the FET-type sensor to suppress sensor baseline drift. An inkjet-printed Pt-In(2)O(3) resistive-type sensor was also fabricated on the same wafer for comparison, and it showed no response to low RH levels (below 18%). In contrast, the FET-type sensor presented excellent low humidity sensitivity and fast response (32% of response and 58 s of response time for 18% RH) as it is able to detect the work-function changes of the sensing material induced by the physisorption of water molecules. The sensing mechanism of the FET-type sensor and the principle behind the difference in sensing performance between two types of sensors were explained through the analysis on the adsorption processes of water molecules and energy band diagrams. This research is very useful for the in-depth study of the humidity-sensing behaviors of Pt-In(2)O(3), and the proposed FET-type humidity sensor could be a potential candidate in the field of real-time gas detection.
format Online
Article
Text
id pubmed-7560637
institution National Center for Biotechnology Information
language English
publishDate 2020
publisher Springer US
record_format MEDLINE/PubMed
spelling pubmed-75606372020-10-19 A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature Wu, Meile Wu, Zhanyu Jin, Xiaoshi Lee, Jong-Ho Nanoscale Res Lett Nano Express In this work, Pt-doped In(2)O(3) nanoparticles (Pt-In(2)O(3)) were inkjet printed on a FET-type sensor platform that has a floating gate horizontally aligned with a control gate for humidity detection at room temperature. The relative humidity (RH)-sensing behavior of the FET-type sensor was investigated in a range from 3.3 (dry air in the work) to about 18%. A pulsed measurement method was applied to the transient RH-sensing tests of the FET-type sensor to suppress sensor baseline drift. An inkjet-printed Pt-In(2)O(3) resistive-type sensor was also fabricated on the same wafer for comparison, and it showed no response to low RH levels (below 18%). In contrast, the FET-type sensor presented excellent low humidity sensitivity and fast response (32% of response and 58 s of response time for 18% RH) as it is able to detect the work-function changes of the sensing material induced by the physisorption of water molecules. The sensing mechanism of the FET-type sensor and the principle behind the difference in sensing performance between two types of sensors were explained through the analysis on the adsorption processes of water molecules and energy band diagrams. This research is very useful for the in-depth study of the humidity-sensing behaviors of Pt-In(2)O(3), and the proposed FET-type humidity sensor could be a potential candidate in the field of real-time gas detection. Springer US 2020-10-14 /pmc/articles/PMC7560637/ /pubmed/33052477 http://dx.doi.org/10.1186/s11671-020-03426-6 Text en © The Author(s) 2020 Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Nano Express
Wu, Meile
Wu, Zhanyu
Jin, Xiaoshi
Lee, Jong-Ho
A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature
title A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature
title_full A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature
title_fullStr A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature
title_full_unstemmed A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature
title_short A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature
title_sort highly sensitive fet-type humidity sensor with inkjet-printed pt-in(2)o(3) nanoparticles at room temperature
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7560637/
https://www.ncbi.nlm.nih.gov/pubmed/33052477
http://dx.doi.org/10.1186/s11671-020-03426-6
work_keys_str_mv AT wumeile ahighlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature
AT wuzhanyu ahighlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature
AT jinxiaoshi ahighlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature
AT leejongho ahighlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature
AT wumeile highlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature
AT wuzhanyu highlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature
AT jinxiaoshi highlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature
AT leejongho highlysensitivefettypehumiditysensorwithinkjetprintedptin2o3nanoparticlesatroomtemperature