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A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In(2)O(3) Nanoparticles at Room Temperature
In this work, Pt-doped In(2)O(3) nanoparticles (Pt-In(2)O(3)) were inkjet printed on a FET-type sensor platform that has a floating gate horizontally aligned with a control gate for humidity detection at room temperature. The relative humidity (RH)-sensing behavior of the FET-type sensor was investi...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7560637/ https://www.ncbi.nlm.nih.gov/pubmed/33052477 http://dx.doi.org/10.1186/s11671-020-03426-6 |