Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects

We present the design, simulation, fabrication and characterization of monolithically integrated high resistivity p-type boron-diffused silicon two-zone heaters in a model high temperature microreactor intended for nanoparticle fabrication. We used a finite element method for simulations of the heat...

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Detalles Bibliográficos
Autores principales: Rašljić Rafajilović, Milena, Radulović, Katarina, Smiljanić, Milče M., Lazić, Žarko, Jakšić, Zoran, Stanisavljev, Dragomir, Radović, Dana Vasiljević
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7569776/
https://www.ncbi.nlm.nih.gov/pubmed/32872382
http://dx.doi.org/10.3390/mi11090818

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