Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model

Integrated 2D spiral inductors possess low inductance per unit area, which limits their application range. However, the state of investigation into the lumped-element parameter extraction method for integrated 3D in-chip multi-turn solenoid inductors, which possess higher inductance per unit area, i...

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Detalles Bibliográficos
Autores principales: Sun, Jiamian, Li, Haiwang, Wu, Sifan, Xu, Tiantong, Li, Hanqing, Wu, Hanxiao, Xia, Shuangzhi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570014/
https://www.ncbi.nlm.nih.gov/pubmed/32899110
http://dx.doi.org/10.3390/mi11090836

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