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A Simple Low-Temperature Glass Bonding Process with Surface Activation by Oxygen Plasma for Micro/Nanofluidic Devices

The bonding of glass substrates is necessary when constructing micro/nanofluidic devices for sealing micro- and nanochannels. Recently, a low-temperature glass bonding method utilizing surface activation with plasma was developed to realize micro/nanofluidic devices for various applications, but it...

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Detalles Bibliográficos
Autores principales:	Shoda, Koki, Tanaka, Minori, Mino, Kensuke, Kazoe, Yutaka
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570177/ https://www.ncbi.nlm.nih.gov/pubmed/32854246 http://dx.doi.org/10.3390/mi11090804

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