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Low-Cost Microbolometer Type Infrared Detectors

The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMO...

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Detalles Bibliográficos
Autores principales:	Yu, Le, Guo, Yaozu, Zhu, Haoyu, Luo, Mingcheng, Han, Ping, Ji, Xiaoli
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570331/ https://www.ncbi.nlm.nih.gov/pubmed/32847091 http://dx.doi.org/10.3390/mi11090800

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