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Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stabili...

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Autores principales: Liu, Ying, Zhang, Yong, Lin, Xin, Lv, Ke-hong, Yang, Peng, Qiu, Jing, Liu, Guan-jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570378/
https://www.ncbi.nlm.nih.gov/pubmed/32825062
http://dx.doi.org/10.3390/mi11090786
_version_ 1783596935020544000
author Liu, Ying
Zhang, Yong
Lin, Xin
Lv, Ke-hong
Yang, Peng
Qiu, Jing
Liu, Guan-jun
author_facet Liu, Ying
Zhang, Yong
Lin, Xin
Lv, Ke-hong
Yang, Peng
Qiu, Jing
Liu, Guan-jun
author_sort Liu, Ying
collection PubMed
description Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavities and the through-hole cavities separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors.
format Online
Article
Text
id pubmed-7570378
institution National Center for Biotechnology Information
language English
publishDate 2020
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-75703782020-10-28 Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis Liu, Ying Zhang, Yong Lin, Xin Lv, Ke-hong Yang, Peng Qiu, Jing Liu, Guan-jun Micromachines (Basel) Article Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavities and the through-hole cavities separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors. MDPI 2020-08-19 /pmc/articles/PMC7570378/ /pubmed/32825062 http://dx.doi.org/10.3390/mi11090786 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Liu, Ying
Zhang, Yong
Lin, Xin
Lv, Ke-hong
Yang, Peng
Qiu, Jing
Liu, Guan-jun
Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
title Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
title_full Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
title_fullStr Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
title_full_unstemmed Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
title_short Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
title_sort improved high-yield pmma/graphene pressure sensor and sealed gas effect analysis
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570378/
https://www.ncbi.nlm.nih.gov/pubmed/32825062
http://dx.doi.org/10.3390/mi11090786
work_keys_str_mv AT liuying improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis
AT zhangyong improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis
AT linxin improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis
AT lvkehong improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis
AT yangpeng improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis
AT qiujing improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis
AT liuguanjun improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis