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Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stabili...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570378/ https://www.ncbi.nlm.nih.gov/pubmed/32825062 http://dx.doi.org/10.3390/mi11090786 |
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author | Liu, Ying Zhang, Yong Lin, Xin Lv, Ke-hong Yang, Peng Qiu, Jing Liu, Guan-jun |
author_facet | Liu, Ying Zhang, Yong Lin, Xin Lv, Ke-hong Yang, Peng Qiu, Jing Liu, Guan-jun |
author_sort | Liu, Ying |
collection | PubMed |
description | Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavities and the through-hole cavities separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors. |
format | Online Article Text |
id | pubmed-7570378 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-75703782020-10-28 Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis Liu, Ying Zhang, Yong Lin, Xin Lv, Ke-hong Yang, Peng Qiu, Jing Liu, Guan-jun Micromachines (Basel) Article Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavities and the through-hole cavities separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors. MDPI 2020-08-19 /pmc/articles/PMC7570378/ /pubmed/32825062 http://dx.doi.org/10.3390/mi11090786 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Liu, Ying Zhang, Yong Lin, Xin Lv, Ke-hong Yang, Peng Qiu, Jing Liu, Guan-jun Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
title | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
title_full | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
title_fullStr | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
title_full_unstemmed | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
title_short | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
title_sort | improved high-yield pmma/graphene pressure sensor and sealed gas effect analysis |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570378/ https://www.ncbi.nlm.nih.gov/pubmed/32825062 http://dx.doi.org/10.3390/mi11090786 |
work_keys_str_mv | AT liuying improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis AT zhangyong improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis AT linxin improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis AT lvkehong improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis AT yangpeng improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis AT qiujing improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis AT liuguanjun improvedhighyieldpmmagraphenepressuresensorandsealedgaseffectanalysis |