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Structure and Properties of ZnO Coatings Obtained by Atomic Layer Deposition (ALD) Method on a Cr-Ni-Mo Steel Substrate Type

This paper aimed to investigate the structure and physicochemical and tribological properties of ZnO coatings deposited by ALD on 316L stainless steel for biomedical applications. To obtain ZnO films, diethylzinc (DEZ) and water were used as ALD precursors. Zinc oxide layers were deposited at the sa...

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Detalles Bibliográficos
Autores principales: Staszuk, Marcin, Pakuła, Daniel, Reimann, Łukasz, Król, Mariusz, Basiaga, Marcin, Mysłek, Dominika, Kříž, Antonín
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7578978/
https://www.ncbi.nlm.nih.gov/pubmed/32977455
http://dx.doi.org/10.3390/ma13194223

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