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Effect of the Anisotropy Mechanical Properties on LN Crystals Fixed-Abrasive Lapping

The anisotropy of lithium niobate (LN) single crystals in mechanical properties affects its material removal uniformity during lapping. The nano-indentation hardness (H(I)) and elastic modulus(E) of Z-cut wafer and X-cut wafer were measured by a nano-indentation tester. The nano-scratching tests wer...

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Detalles Bibliográficos
Autores principales:	Zhu, Nannan, Chen, Jiapeng, Zhou, Piao, Zhu, Yongwei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7579184/ https://www.ncbi.nlm.nih.gov/pubmed/33050018 http://dx.doi.org/10.3390/ma13194455

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