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A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation

Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed as a replacement for magnetometers currently used in consumer electronics market. Being MEMS devices, they can be manufactured in the same die as accelerometers and gyroscopes, greatly reducing current solutions vol...

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Detalles Bibliográficos
Autores principales:	Sánchez-Chiva, Josep Maria, Valle, Juan, Fernández, Daniel, Madrenas, Jordi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7589634/ https://www.ncbi.nlm.nih.gov/pubmed/33086559 http://dx.doi.org/10.3390/s20205899

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