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Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers

We present a wafer-level vacuum-packaged (WLVP) translatory micro-electro-mechanical system (MEMS) actuator developed for a compact near-infrared-Fourier transform spectrometer (NIR-FTS) with 800–2500 nm spectral bandwidth and signal-nose-ratio (SNR) > 1000 in the smaller bandwidth range (1200–25...

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Detalles Bibliográficos
Autores principales:	Sandner, Thilo, Gaumont, Eric, Graßhoff, Thomas, Rieck, Andreas, Seifert, Tobias, Auböck, Gerald, Grahmann, Jan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7598276/ https://www.ncbi.nlm.nih.gov/pubmed/32977467 http://dx.doi.org/10.3390/mi11100883

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