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A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors
Implantable active electronic microchips are being developed as multinode in-body sensors and actuators. There is a need to develop high throughput microfabrication techniques applicable to complementary metal–oxide–semiconductor (CMOS)-based silicon electronics in order to process bare dies from a...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7600457/ https://www.ncbi.nlm.nih.gov/pubmed/33028005 http://dx.doi.org/10.3390/mi11100925 |