Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts

Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT a...

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Detalles Bibliográficos
Autores principales: Ma, Zichao, Zhou, Shaolin, Zhou, Changjian, Xiao, Ying, Li, Suwen, Chan, Mansun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7600545/
https://www.ncbi.nlm.nih.gov/pubmed/32992981
http://dx.doi.org/10.3390/nano10101918

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