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A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution mo...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7670420/ https://www.ncbi.nlm.nih.gov/pubmed/33199732 http://dx.doi.org/10.1038/s41598-020-76793-w |
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author | Huang, Bin Fu, Teng Xu, Xiao-bo Chen, Mei-xian Zhou, Yang Zhang, Yong Liu, Shan-lin |
author_facet | Huang, Bin Fu, Teng Xu, Xiao-bo Chen, Mei-xian Zhou, Yang Zhang, Yong Liu, Shan-lin |
author_sort | Huang, Bin |
collection | PubMed |
description | The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution model of the air film is established, and the deformation expression of the large liquid crystal glass substrate in air-flotation system is given. On this basis, a theoretical design method for designing nozzle pitch of orifice throttling air-flotation system was proposed. Combined with examples, the results of theories and simulation are compared. An experiment on the deformation of the glass substrate was carried out on an experimental prototype. The difference between the experimental results and the theoretical results does not exceed 10%. |
format | Online Article Text |
id | pubmed-7670420 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-76704202020-11-18 A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation Huang, Bin Fu, Teng Xu, Xiao-bo Chen, Mei-xian Zhou, Yang Zhang, Yong Liu, Shan-lin Sci Rep Article The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution model of the air film is established, and the deformation expression of the large liquid crystal glass substrate in air-flotation system is given. On this basis, a theoretical design method for designing nozzle pitch of orifice throttling air-flotation system was proposed. Combined with examples, the results of theories and simulation are compared. An experiment on the deformation of the glass substrate was carried out on an experimental prototype. The difference between the experimental results and the theoretical results does not exceed 10%. Nature Publishing Group UK 2020-11-16 /pmc/articles/PMC7670420/ /pubmed/33199732 http://dx.doi.org/10.1038/s41598-020-76793-w Text en © The Author(s) 2020 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Huang, Bin Fu, Teng Xu, Xiao-bo Chen, Mei-xian Zhou, Yang Zhang, Yong Liu, Shan-lin A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation |
title | A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation |
title_full | A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation |
title_fullStr | A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation |
title_full_unstemmed | A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation |
title_short | A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation |
title_sort | theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7670420/ https://www.ncbi.nlm.nih.gov/pubmed/33199732 http://dx.doi.org/10.1038/s41598-020-76793-w |
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