A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation

The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution mo...

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Autores principales: Huang, Bin, Fu, Teng, Xu, Xiao-bo, Chen, Mei-xian, Zhou, Yang, Zhang, Yong, Liu, Shan-lin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7670420/
https://www.ncbi.nlm.nih.gov/pubmed/33199732
http://dx.doi.org/10.1038/s41598-020-76793-w
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author Huang, Bin
Fu, Teng
Xu, Xiao-bo
Chen, Mei-xian
Zhou, Yang
Zhang, Yong
Liu, Shan-lin
author_facet Huang, Bin
Fu, Teng
Xu, Xiao-bo
Chen, Mei-xian
Zhou, Yang
Zhang, Yong
Liu, Shan-lin
author_sort Huang, Bin
collection PubMed
description The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution model of the air film is established, and the deformation expression of the large liquid crystal glass substrate in air-flotation system is given. On this basis, a theoretical design method for designing nozzle pitch of orifice throttling air-flotation system was proposed. Combined with examples, the results of theories and simulation are compared. An experiment on the deformation of the glass substrate was carried out on an experimental prototype. The difference between the experimental results and the theoretical results does not exceed 10%.
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spelling pubmed-76704202020-11-18 A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation Huang, Bin Fu, Teng Xu, Xiao-bo Chen, Mei-xian Zhou, Yang Zhang, Yong Liu, Shan-lin Sci Rep Article The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution model of the air film is established, and the deformation expression of the large liquid crystal glass substrate in air-flotation system is given. On this basis, a theoretical design method for designing nozzle pitch of orifice throttling air-flotation system was proposed. Combined with examples, the results of theories and simulation are compared. An experiment on the deformation of the glass substrate was carried out on an experimental prototype. The difference between the experimental results and the theoretical results does not exceed 10%. Nature Publishing Group UK 2020-11-16 /pmc/articles/PMC7670420/ /pubmed/33199732 http://dx.doi.org/10.1038/s41598-020-76793-w Text en © The Author(s) 2020 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Huang, Bin
Fu, Teng
Xu, Xiao-bo
Chen, Mei-xian
Zhou, Yang
Zhang, Yong
Liu, Shan-lin
A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
title A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
title_full A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
title_fullStr A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
title_full_unstemmed A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
title_short A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
title_sort theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7670420/
https://www.ncbi.nlm.nih.gov/pubmed/33199732
http://dx.doi.org/10.1038/s41598-020-76793-w
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