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A theoretical design method for the nozzle pitch of air-flotation system to reduce large liquid crystal display glass substrate’s deformation
The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution mo...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7670420/ https://www.ncbi.nlm.nih.gov/pubmed/33199732 http://dx.doi.org/10.1038/s41598-020-76793-w |