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Characterization and Manipulation of Carbon Precursor Species during Plasma Enhanced Chemical Vapor Deposition of Graphene

To develop a synthesis technique providing enhanced control of graphene film quality and uniformity, a systematic characterization and manipulation of hydrocarbon precursors generated during plasma enhanced chemical vapor deposition of graphene is presented. Remote ionization of acetylene is observe...

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Detalles Bibliográficos
Autores principales:	Zietz, Otto, Olson, Samuel, Coyne, Brendan, Liu, Yilian, Jiao, Jun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7696751/ https://www.ncbi.nlm.nih.gov/pubmed/33187078 http://dx.doi.org/10.3390/nano10112235

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