Advanced Top-Down Fabrication for a Fused Silica Nanofluidic Device

Nanofluidics have recently attracted significant attention with regard to the development of new functionalities and applications, and producing new functional devices utilizing nanofluidics will require the fabrication of nanochannels. Fused silica nanofluidic devices fabricated by top-down methods...

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Detalles Bibliográficos
Autores principales: Morikawa, Kyojiro, Kazoe, Yutaka, Takagi, Yuto, Tsuyama, Yoshiyuki, Pihosh, Yuriy, Tsukahara, Takehiko, Kitamori, Takehiko
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697862/
https://www.ncbi.nlm.nih.gov/pubmed/33182488
http://dx.doi.org/10.3390/mi11110995

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