The Influence and Compensation Method of Eccentricity for Cylindrical Specimens in Eddy Current Displacement Measurement

The eddy current displacement sensor (ECDS) is used to realize the precise detection of the rotor radial position in the magnetic suspension motor. The eccentricity between the probe axis and the measured surface normal reduces the measurement accuracy. An ECDS mathematical model is established to analyze the influence of the measured surface curvature and eccentricity on detection results. The eddy current density distribution law of the measured surface is obtained by using the finite element method (FEM). The experimental platform is set up based on the practical engineering structure, which contains two kinds structures of the single probe and the differential. The compensation method is introduced to reduce the error caused by the eccentricity. The displacement measurement error with and without compensation are tested separately. The results show that the largest full-scale error is less than 0.8% after compensation in the single probe structure, and 0.6% in the differential structure. For the engineering application, the orthogonal direction measured value is used as the eccentricity, and the compensation order of big then small is proposed. It is thus proved that the compensation method provides a guarantee for accurate feedback and control of the rotor radial position in the magnetic suspension motor system.