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Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review

The evolution of engineering applications is increasingly shifting towards the embedded nature, resulting in low-cost solutions, micro/nano dimensional and actuators being exploited as fundamental components to connect the physical nature of information with the abstract one, which is represented in...

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Detalles Bibliográficos
Autores principales: Versaci, Mario, di Barba, Paolo, Morabito, Francesco Carlo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700493/
https://www.ncbi.nlm.nih.gov/pubmed/33233398
http://dx.doi.org/10.3390/membranes10110361
_version_ 1783616293150130176
author Versaci, Mario
di Barba, Paolo
Morabito, Francesco Carlo
author_facet Versaci, Mario
di Barba, Paolo
Morabito, Francesco Carlo
author_sort Versaci, Mario
collection PubMed
description The evolution of engineering applications is increasingly shifting towards the embedded nature, resulting in low-cost solutions, micro/nano dimensional and actuators being exploited as fundamental components to connect the physical nature of information with the abstract one, which is represented in the logical form in a machine. In this context, the scientific community has gained interest in modeling membrane Micro-Electro-Mechanical-Systems (MEMS), leading to a wide diffusion on an industrial level owing to their ease of modeling and realization. Physically, once the external voltage is applied, an electrostatic field, orthogonal to the tangent line of the membrane, is established inside the device, producing an electrostatic pressure that acts on the membrane, deforming it. Evidently, the greater the amplitude of the electrostatic field is, the greater the curvature of the membrane. Thus, it seems natural to consider the amplitude of the electrostatic field proportional to the curvature of the membrane. Starting with this principle, the authors are actively involved in developing a second-order semi-linear elliptic model in 1D and 2D geometries, obtaining important results regarding the existence, uniqueness and stability of solutions as well as evaluating the particular operating conditions of use of membrane MEMS devices. In this context, the idea of providing a survey matures to discussing the similarities and differences between the analytical and numerical results in detail, thereby supporting the choice of certain membrane MEMS devices according to the industrial application. Finally, some original results about the stability of the membrane in 2D geometry are presented and discussed.
format Online
Article
Text
id pubmed-7700493
institution National Center for Biotechnology Information
language English
publishDate 2020
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-77004932020-11-30 Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review Versaci, Mario di Barba, Paolo Morabito, Francesco Carlo Membranes (Basel) Review The evolution of engineering applications is increasingly shifting towards the embedded nature, resulting in low-cost solutions, micro/nano dimensional and actuators being exploited as fundamental components to connect the physical nature of information with the abstract one, which is represented in the logical form in a machine. In this context, the scientific community has gained interest in modeling membrane Micro-Electro-Mechanical-Systems (MEMS), leading to a wide diffusion on an industrial level owing to their ease of modeling and realization. Physically, once the external voltage is applied, an electrostatic field, orthogonal to the tangent line of the membrane, is established inside the device, producing an electrostatic pressure that acts on the membrane, deforming it. Evidently, the greater the amplitude of the electrostatic field is, the greater the curvature of the membrane. Thus, it seems natural to consider the amplitude of the electrostatic field proportional to the curvature of the membrane. Starting with this principle, the authors are actively involved in developing a second-order semi-linear elliptic model in 1D and 2D geometries, obtaining important results regarding the existence, uniqueness and stability of solutions as well as evaluating the particular operating conditions of use of membrane MEMS devices. In this context, the idea of providing a survey matures to discussing the similarities and differences between the analytical and numerical results in detail, thereby supporting the choice of certain membrane MEMS devices according to the industrial application. Finally, some original results about the stability of the membrane in 2D geometry are presented and discussed. MDPI 2020-11-21 /pmc/articles/PMC7700493/ /pubmed/33233398 http://dx.doi.org/10.3390/membranes10110361 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Versaci, Mario
di Barba, Paolo
Morabito, Francesco Carlo
Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
title Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
title_full Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
title_fullStr Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
title_full_unstemmed Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
title_short Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
title_sort curvature-dependent electrostatic field as a principle for modelling membrane-based mems devices. a review
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700493/
https://www.ncbi.nlm.nih.gov/pubmed/33233398
http://dx.doi.org/10.3390/membranes10110361
work_keys_str_mv AT versacimario curvaturedependentelectrostaticfieldasaprincipleformodellingmembranebasedmemsdevicesareview
AT dibarbapaolo curvaturedependentelectrostaticfieldasaprincipleformodellingmembranebasedmemsdevicesareview
AT morabitofrancescocarlo curvaturedependentelectrostaticfieldasaprincipleformodellingmembranebasedmemsdevicesareview