Actively tunable THz filter based on an electromagnetically induced transparency analog hybridized with a MEMS metamaterial

Electromagnetically induced transparency (EIT) analogs in classical oscillator systems have been investigated due to their potential in optical applications such as nonlinear devices and the slow-light field. Metamaterials are good candidates that utilize EIT-like effects to regulate optical light. Here, an actively reconfigurable EIT metamaterial for controlling THz waves, which consists of a movable bar and a fixed wire pair, is numerically and experimentally proposed. By changing the distance between the bar and wire pair through microelectromechanical system (MEMS) technology, the metamaterial can controllably regulate the EIT behavior to manipulate the waves around 1.832 THz, serving as a dynamic filter. A high transmittance modulation rate of 38.8% is obtained by applying a drive voltage to the MEMS actuator. The dispersion properties and polarization of the metamaterial are also investigated. Since this filter is readily miniaturized and integrated by taking advantage of MEMS, it is expected to significantly promote the development of THz-related practical applications such as THz biological detection and THz communications.