Silicon twisted cone structure produced by optical vortex pulse with structure evaluation by radiation hydrodynamic simulation

We demonstrate a radiation hydrodynamic simulation of optical vortex pulse-ablated microcone structures on silicon (Si) substrates. Doughnut-shaped craters were formed by single pulse irradiation on the Si substrate, and a twisted cone structure with a height of 3.5 µm was created at the center of t...

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Detalles Bibliográficos
Autores principales: Nakamura, Daisuke, Tasaki, Ryohei, Kawamoto, Miki, Oshima, Hiroki, Higashihata, Mitsuhiro, Ikenoue, Hiroshi, Wakayama, Toshitaka, Sunahara, Atsushi, Higashiguchi, Takeshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7708847/
https://www.ncbi.nlm.nih.gov/pubmed/33262358
http://dx.doi.org/10.1038/s41598-020-77323-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7708847/
https://www.ncbi.nlm.nih.gov/pubmed/33262358
http://dx.doi.org/10.1038/s41598-020-77323-4

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