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Structural, Compositional, and Plasmonic Characteristics of Ti–Zr Ternary Nitride Thin Films Tuned by the Nitrogen Flow Ratio in Magnetron Sputtering

Ternary nitride gives high diversity and tunability of the plasmonic materials. In this work, highly crystallized ternary (Ti, Zr)N [Formula: see text] films were prepared by magnetron co-sputtering with different nitrogen gas flow ratio [Formula: see text]. The structural and plasmonic properties o...

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Detalles Bibliográficos
Autores principales:	Chen, Lianlian, Ran, Yujing, Jiang, Zhaotan, Li, Yinglan, Wang, Zhi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7712802/ https://www.ncbi.nlm.nih.gov/pubmed/32349287 http://dx.doi.org/10.3390/nano10050829

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