A Robust Infrared Transducer of an Ultra-Large-Scale Array

A robust micro-electro-mechanical systems (MEMS) infrared thin film transducer of an ultra-large-scale array was proposed and fabricated on a 4-inch silicon wafer. The silicon substrate and micro cavities were introduced. This novel transducer had excellent mechanical stability, time response, and s...

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Detalles Bibliográficos
Autores principales: Li, Defang, Zhang, Jinying, Shi, Qingfeng, Yuan, Xichen, Li, Zhuo, Wang, Xin, Yang, Suhui, Hao, Yan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7731021/
https://www.ncbi.nlm.nih.gov/pubmed/33260550
http://dx.doi.org/10.3390/s20236807

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7731021/
https://www.ncbi.nlm.nih.gov/pubmed/33260550
http://dx.doi.org/10.3390/s20236807

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