A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature

Disease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature...

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Detalles Bibliográficos
Autores principales: Takahashi, Toshiaki, Choi, Yong-Joon, Sawada, Kazuaki, Takahashi, Kazuhiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7731219/
https://www.ncbi.nlm.nih.gov/pubmed/33266348
http://dx.doi.org/10.3390/s20236868

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7731219/
https://www.ncbi.nlm.nih.gov/pubmed/33266348
http://dx.doi.org/10.3390/s20236868

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