Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection

We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O(2)...

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Detalles Bibliográficos
Autores principales: Mafi, Elham, Calvano, Nicholas, Patel, Jessica, Islam, Md. Sherajul, Hasan Khan, Md. Sakib, Rana, Mukti
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7759807/
https://www.ncbi.nlm.nih.gov/pubmed/33271897
http://dx.doi.org/10.3390/mi11121073

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7759807/
https://www.ncbi.nlm.nih.gov/pubmed/33271897
http://dx.doi.org/10.3390/mi11121073

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