Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics

In this paper, a COMSOL Multiphysics-based methodology is presented for evaluation of the microelectromechanical systems (MEMS) gyroscope. The established finite element analysis (FEA) model was successfully validated through a comparison with analytical and Matlab/Simulink analysis results. A simpl...

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Detalles Bibliográficos
Autores principales: Din, Hussamud, Iqbal, Faisal, Lee, Byeungleul
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7759875/
https://www.ncbi.nlm.nih.gov/pubmed/33255312
http://dx.doi.org/10.3390/mi11121030

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7759875/
https://www.ncbi.nlm.nih.gov/pubmed/33255312
http://dx.doi.org/10.3390/mi11121030

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