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Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy

The present overview describes the evolution of new microdosimeters developed in the National Microelectronics Center in Spain (IMB-CNM, CSIC), ranging from the first ultra-thin 3D diodes (U3DTHINs) to the advanced 3D-cylindrical microdetectors, which have been developed over the last 10 years. In t...

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Autores principales: Guardiola, Consuelo, Fleta, Celeste, Quirion, David, Pellegrini, Giulio, Gómez, Faustino
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7760635/
https://www.ncbi.nlm.nih.gov/pubmed/33260634
http://dx.doi.org/10.3390/mi11121053
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author Guardiola, Consuelo
Fleta, Celeste
Quirion, David
Pellegrini, Giulio
Gómez, Faustino
author_facet Guardiola, Consuelo
Fleta, Celeste
Quirion, David
Pellegrini, Giulio
Gómez, Faustino
author_sort Guardiola, Consuelo
collection PubMed
description The present overview describes the evolution of new microdosimeters developed in the National Microelectronics Center in Spain (IMB-CNM, CSIC), ranging from the first ultra-thin 3D diodes (U3DTHINs) to the advanced 3D-cylindrical microdetectors, which have been developed over the last 10 years. In this work, we summarize the design, main manufacture processes, and electrical characterization of these devices. These sensors were specifically customized for use in particle therapy and overcame some of the technological challenges in this domain, namely the low noise capability, well-defined sensitive volume, high spatial resolution, and pile-up robustness. Likewise, both architectures reduce the loss of charge carriers due to trapping effects, the charge collection time, and the voltage required for full depletion compared to planar silicon detectors. In particular, a 3D‒cylindrical architecture with electrodes inserted into the silicon bulk and with a very well‒delimited sensitive volume (SV) mimicked a cell array with shapes and sizes similar to those of mammalian cells for the first time. Experimental tests of the carbon beamlines at the Grand Accélérateur National d’Lourds (GANIL, France) and Centro Nazionale Adroterapia Oncologica (CNAO, Italy) showed the feasibility of the U3DTHINs in hadron therapy beams and the good performance of the 3D‒cylindrical microdetectors for assessing linear energy distributions of clinical beams, with clinical fluence rates of 5 × 10(7) s(−1)cm(−2) without saturation. The dose-averaged lineal energies showed a generally good agreement with Monte Carlo simulations. The results indicated that these devices can be used to characterize the microdosimetric properties in hadron therapy, even though the charge collection efficiency (CCE) and electronic noise may pose limitations on their performance, which is studied and discussed herein. In the last 3D‒cylindrical microdetector generation, we considerably improved the CCE due to the microfabrication enhancements, which have led to shallower and steeper dopant profiles. We also summarize the successive microdosimetric characterizations performed with both devices in proton and carbon beamlines.
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spelling pubmed-77606352020-12-26 Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy Guardiola, Consuelo Fleta, Celeste Quirion, David Pellegrini, Giulio Gómez, Faustino Micromachines (Basel) Review The present overview describes the evolution of new microdosimeters developed in the National Microelectronics Center in Spain (IMB-CNM, CSIC), ranging from the first ultra-thin 3D diodes (U3DTHINs) to the advanced 3D-cylindrical microdetectors, which have been developed over the last 10 years. In this work, we summarize the design, main manufacture processes, and electrical characterization of these devices. These sensors were specifically customized for use in particle therapy and overcame some of the technological challenges in this domain, namely the low noise capability, well-defined sensitive volume, high spatial resolution, and pile-up robustness. Likewise, both architectures reduce the loss of charge carriers due to trapping effects, the charge collection time, and the voltage required for full depletion compared to planar silicon detectors. In particular, a 3D‒cylindrical architecture with electrodes inserted into the silicon bulk and with a very well‒delimited sensitive volume (SV) mimicked a cell array with shapes and sizes similar to those of mammalian cells for the first time. Experimental tests of the carbon beamlines at the Grand Accélérateur National d’Lourds (GANIL, France) and Centro Nazionale Adroterapia Oncologica (CNAO, Italy) showed the feasibility of the U3DTHINs in hadron therapy beams and the good performance of the 3D‒cylindrical microdetectors for assessing linear energy distributions of clinical beams, with clinical fluence rates of 5 × 10(7) s(−1)cm(−2) without saturation. The dose-averaged lineal energies showed a generally good agreement with Monte Carlo simulations. The results indicated that these devices can be used to characterize the microdosimetric properties in hadron therapy, even though the charge collection efficiency (CCE) and electronic noise may pose limitations on their performance, which is studied and discussed herein. In the last 3D‒cylindrical microdetector generation, we considerably improved the CCE due to the microfabrication enhancements, which have led to shallower and steeper dopant profiles. We also summarize the successive microdosimetric characterizations performed with both devices in proton and carbon beamlines. MDPI 2020-11-28 /pmc/articles/PMC7760635/ /pubmed/33260634 http://dx.doi.org/10.3390/mi11121053 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Guardiola, Consuelo
Fleta, Celeste
Quirion, David
Pellegrini, Giulio
Gómez, Faustino
Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy
title Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy
title_full Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy
title_fullStr Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy
title_full_unstemmed Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy
title_short Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy
title_sort silicon 3d microdetectors for microdosimetry in hadron therapy
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7760635/
https://www.ncbi.nlm.nih.gov/pubmed/33260634
http://dx.doi.org/10.3390/mi11121053
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