Cargando…
A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications
Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform forward-view scanning, which drastically incr...
Autores principales: | , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7761163/ https://www.ncbi.nlm.nih.gov/pubmed/33260524 http://dx.doi.org/10.3390/mi11121051 |
_version_ | 1783627503937519616 |
---|---|
author | Zheng, Dong Wang, Dingkang Yoon, YK Xie, Huikai |
author_facet | Zheng, Dong Wang, Dingkang Yoon, YK Xie, Huikai |
author_sort | Zheng, Dong |
collection | PubMed |
description | Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform forward-view scanning, which drastically increases the diameter of the resultant MEMS endoscopic probe. This paper presents a new monolithic two-axis forward-view optical scanner that is composed of an electrothermally driven MEMS mirror and a beam folding mirror both vertically standing and integrated on a silicon substrate. The mirror plates of the two mirrors are parallel to each other with a small distance of 0.6 mm. The laser beam can be incident first on the MEMS mirror and then on the beam folding mirror, both at 45°. The MEMS scanner has been successfully fabricated. The measured optical scan angles of the MEMS mirror were 10.3° for the x axis and 10.2° for the y axis operated under only 3 V. The measured tip-tilt resonant frequencies of the MEMS mirror were 1590 Hz and 1850 Hz, respectively. With this compact MEMS design, a forward-view scanning endoscopic probe with an outer diameter as small as 2.5 mm can be made, which will enable such imaging probes to enter the subsegmental bronchi of an adult patient. |
format | Online Article Text |
id | pubmed-7761163 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-77611632020-12-26 A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications Zheng, Dong Wang, Dingkang Yoon, YK Xie, Huikai Micromachines (Basel) Article Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform forward-view scanning, which drastically increases the diameter of the resultant MEMS endoscopic probe. This paper presents a new monolithic two-axis forward-view optical scanner that is composed of an electrothermally driven MEMS mirror and a beam folding mirror both vertically standing and integrated on a silicon substrate. The mirror plates of the two mirrors are parallel to each other with a small distance of 0.6 mm. The laser beam can be incident first on the MEMS mirror and then on the beam folding mirror, both at 45°. The MEMS scanner has been successfully fabricated. The measured optical scan angles of the MEMS mirror were 10.3° for the x axis and 10.2° for the y axis operated under only 3 V. The measured tip-tilt resonant frequencies of the MEMS mirror were 1590 Hz and 1850 Hz, respectively. With this compact MEMS design, a forward-view scanning endoscopic probe with an outer diameter as small as 2.5 mm can be made, which will enable such imaging probes to enter the subsegmental bronchi of an adult patient. MDPI 2020-11-28 /pmc/articles/PMC7761163/ /pubmed/33260524 http://dx.doi.org/10.3390/mi11121051 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zheng, Dong Wang, Dingkang Yoon, YK Xie, Huikai A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications |
title | A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications |
title_full | A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications |
title_fullStr | A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications |
title_full_unstemmed | A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications |
title_short | A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications |
title_sort | silicon optical bench-based forward-view two-axis scanner for microendoscopy applications |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7761163/ https://www.ncbi.nlm.nih.gov/pubmed/33260524 http://dx.doi.org/10.3390/mi11121051 |
work_keys_str_mv | AT zhengdong asiliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications AT wangdingkang asiliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications AT yoonyk asiliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications AT xiehuikai asiliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications AT zhengdong siliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications AT wangdingkang siliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications AT yoonyk siliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications AT xiehuikai siliconopticalbenchbasedforwardviewtwoaxisscannerformicroendoscopyapplications |