Microstructure-Induced Anisotropic Optical Properties of YF(3) Columnar Thin Films Prepared by Glancing Angle Deposition

Yttrium fluoride (YF(3)) columnar thin films (CTFs) were fabricated by electron beam evaporation with the glancing angle deposition method. The microstructures and optical properties of YF(3) CTFs were studied systematically. The YF(3) films grown at different deposition angles are all amorphous. As the deposition angle increases, the columns in YF(3) CTFs become increasingly separated and inclined, and the volume fraction of YF(3) decreases, resulting in lower refractive indices. This phenomenon is attributed to the self-shadowing effect and limited adatom diffusion. The YF(3) CTFs are optically biaxial anisotropic with the long axis (c-axis) parallel to the columns, the short axis (b-axis) perpendicular to the columns, and the other axis (a-axis) parallel to the film interface. The principal refractive index along the b-axis for the 82°-deposited sample is approximately 1.233 at 550 nm. For the 78°-deposited sample, the differences of principal refractive indices between the c-axis and the b-axis and between the a-axis and the b-axis reach the maximum 0.056 and 0.029, respectively. The differences of principal refractive indices were affected by both the deposition angle and the volume fraction of YF(3).