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Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors

This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivat...

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Detalles Bibliográficos
Autores principales:	Cabral, Patrícia D., Domingues, Telma, Machado, George, Chicharo, Alexandre, Cerqueira, Fátima, Fernandes, Elisabete, Athayde, Emília, Alpuim, Pedro, Borme, Jérôme
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7765539/ https://www.ncbi.nlm.nih.gov/pubmed/33334060 http://dx.doi.org/10.3390/ma13245728

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