Manufacturability and Stress Issues in 3D Silicon Detector Technology at IMB-CNM

This paper provides an overview of 3D detectors fabrication technology developed in the clean room of the Microelectronics Institute of Barcelona (IMB-CNM). Emphasis is put on manufacturability, especially on stress and bow issues. Some of the technological solutions proposed at IMB-CNM to improve m...

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Detalles Bibliográficos
Autores principales: Quirion, David, Manna, Maria, Hidalgo, Salvador, Pellegrini, Giulio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7766386/
https://www.ncbi.nlm.nih.gov/pubmed/33353092
http://dx.doi.org/10.3390/mi11121126

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7766386/
https://www.ncbi.nlm.nih.gov/pubmed/33353092
http://dx.doi.org/10.3390/mi11121126

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