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Manufacturability and Stress Issues in 3D Silicon Detector Technology at IMB-CNM

This paper provides an overview of 3D detectors fabrication technology developed in the clean room of the Microelectronics Institute of Barcelona (IMB-CNM). Emphasis is put on manufacturability, especially on stress and bow issues. Some of the technological solutions proposed at IMB-CNM to improve m...

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Detalles Bibliográficos
Autores principales:	Quirion, David, Manna, Maria, Hidalgo, Salvador, Pellegrini, Giulio
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7766386/ https://www.ncbi.nlm.nih.gov/pubmed/33353092 http://dx.doi.org/10.3390/mi11121126

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