Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure

Thin-film piezoelectric-on-silicon (TPoS) microelectromechanical (MEMS) resonators are required to have high Q-factor to offer satisfactory results in their application areas, such as oscillator, filter, and sensors. This paper proposed a phononic crystal (PnC)-reflector composite structure to impro...

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Detalles Bibliográficos
Autores principales: Liu, Jiacheng, Workie, Temesgen Bailie, Wu, Ting, Wu, Zhaohui, Gong, Keyuan, Bao, Jingfu, Hashimoto, Ken-ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7767028/
https://www.ncbi.nlm.nih.gov/pubmed/33419352
http://dx.doi.org/10.3390/mi11121130

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