Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The WGM optical transmission coupling model was analyzed and compared by adjusting key parameters, such as the cavity radius, the waveguide width, and the gap between them for silicon and silicon nitride materials in simulations, which will greatly affect the quality factor (Q) of the WGM resonator. Furthermore, the structural parameters of the disk resonant gyroscope were also optimized. Then, the fabrication process was optimized to overcome the difficulties in the realization of micro-optical devices. Finally, a gyroscope prototype with the integrated WGM resonator was verified experimentally. The scale factor and bias instability performance of the MOEMS gyroscope was 2.63 mv/°/s and 4.0339°/h, respectively.