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Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing

Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Th...

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Detalles Bibliográficos
Autores principales:	Zakrzewski, Adrian, Jurewicz, Piotr, Ćwikła, Michał, Koruba, Piotr, Reiner, Jacek
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7792605/ https://www.ncbi.nlm.nih.gov/pubmed/33374993 http://dx.doi.org/10.3390/s21010008

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