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Modeling the Piezoelectric Cantilever Resonator with Different Width Layers

The piezoelectric cantilever resonator is used widely in many fields because of its perfect design, easy-to-control process, easy integration with the integrated circuit. The tip displacement and resonance frequency are two important characters of the piezoelectric cantilever resonator and many mode...

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Detalles Bibliográficos
Autores principales:	Liu, Zhenxi, Chen, Jiamin, Zou, Xudong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7796114/ https://www.ncbi.nlm.nih.gov/pubmed/33375611 http://dx.doi.org/10.3390/s21010087

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