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Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater
[Image: see text] In this study, a simple and cost-effective metal oxide semiconductor (MOS) gas sensor, which can be fabricated utilizing only two photolithography steps, was designed and developed through the planar microelectromechanical systems (MEMS) technique. Ball-milled porous tin dioxide na...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818299/ https://www.ncbi.nlm.nih.gov/pubmed/33490780 http://dx.doi.org/10.1021/acsomega.0c04340 |